SMT, PCB Electronics Industry News
  • SMTnet
  • »
  • Industry News
  • »
  • Nordson MARCH Introduces the SPHERE Series Plasma Treatment Systems for Semiconductor Applications

Nordson MARCH Introduces the SPHERE Series Plasma Treatment Systems for Semiconductor Applications

Jul 01, 2015

SPHERE™ Series plasma systems for wafer-level and 3D packaging applications.

SPHERE™ Series plasma systems for wafer-level and 3D packaging applications.

Nordson MARCH to be exhibiting at SEMICON West booth #5743

Nordson MARCH, a Nordson company (NASDAQ: NDSN), a global leader in plasma processing technology, announces its new SPHERE™ Series plasma systems for wafer-level and 3D packaging applications. Based on Nordson MARCH's TRAK™ Series, the new series consists of the TrophoSPHERE™ and StratoSPHERE™ plasma treatment systems. The systems perform descum, ashing (photoresist/polymer stripping), dielectric etch, wafer bumping, organic contamination removal, and wafer destress. Both systems support automated handling and processing of round or square wafers and can process thin wafers with or without a carrier, depending upon the wafer thickness.

The SPHERE Series models are differentiated by the size of their chambers. The TropoSPHERE system has the smallest chamber. It is designed for high-throughput processing of semiconductor wafers and other flat substrates in sizes ranging from 76 mm (3 in.) to 200 mm (8 in.) in diameter for wafers held in open cassettes. The StratoSPHERE plasma system handles semiconductor wafers up to 300 mm (12 in.) in diameter. Both series utilize a patented plasma chamber design that provides exceptional etch uniformity and process repeatability. The control architecture enables short plasma cycle times with very low overhead, ensuring that throughput is maximized and cost of ownership is minimized.

"Nordson MARCH's SPHERE Series is an easy way to eliminate problems caused by contaminants that result from the semiconductor manufacturing process," said Jonathan Doan, director of marketing, Nordson MARCH. "Our plasma treatment can be used for both wafer cleaning and a variety of etching, ashing, and descum steps along with contamination removal, surface roughening, increasing wettability, and enhancing bonding and adhesion strength. I invite SEMICON West attendees to meet with our technical experts at the Nordson MARCH booth #5743 to discuss how plasma treatment can improve the quality and success of their manufacturing process and products."

Nordson MARCH technical experts will be in booth #5743 at SEMICON West 2015, held in the Moscone Convention Center, San Francisco, CA from July 14-16, to discuss your applications. For more information or to schedule an appointment, contact Nordson MARCH at info@nordsonmarch.com, call +1.925.827.1240, or visit our website at www.nordsonmarch.com. 


Nordson MARCH is the global leader in plasma processing technology for the semiconductor, printed circuit board (PCB), microelectronics, and medical & life science device manufacturing industries. Nordson MARCH has offices and applications laboratories worldwide, including California, Europe, Singapore, China, Japan, Korea and Taiwan. With over 25 years of continuous innovation, Nordson MARCH designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve product reliability and increase production yields. Visit Nordson MARCH on the web at www.nordsonmarch.com, www.facebook.com/NordsonMARCH, www.twitter.com/NordsonMARCH, or Google+.

Nordson Corporation delivers precision technology solutions that help customers succeed worldwide. Precision dispensing of adhesives, coatings, sealants, biomaterials, and other fluids, plastic extrusion and injection molding, electronics testing and inspecting, and surface preparation are supported by applications expertise and direct global support. Nordson serves consumer non-durable, durable and high-technology markets, specializing in packaging, nonwovens, electronics, medical, energy, transportation, construction, and product assembly. Founded in 1954, headquartered in Westlake, Ohio, USA, Nordson has operations and support offices in 30+ countries. Connect with Nordson at www.nordson.com and on social media.

Aug 03, 2017 -

Revolutionary AOI, AXI and & Bondtesting from Nordson at NEPCON South China

Mar 07, 2017 -

Nordson MARCH Wins 2017 New Product Introduction Award for its ModVIA Plasma System

Feb 07, 2017 -

Nordson MARCH's New Plasma Polymerization Deposition Systems Deposit Materials During Precision Manufacturing Processes

Oct 11, 2016 -

Nordson MARCH Receives Global Technology Award for FlexTRAK-CDS High-volume Plasma System

Sep 21, 2016 -

Nordson MARCH's Plasma Confinement Ring Increases Etch Rate and Improves Treatment Uniformity for Wafer Processing

Mar 03, 2016 -

Nordson MARCH Research Evaluates the Effects of RF Plasma Processing Prior to Conformal Coating on Adhesion, Conformity of Coverage, and Electrical Functionality

Aug 20, 2015 -

Nordson MARCH StratoSPHERE Plasma Treatment System Expands Up to 6 Chambers for Increased Throughput and Flexibility

Jun 07, 2011 -

Nordson MARCH MaxVIA System Offers Superior PCB Plasma Treatment Uniformity for Varied Panel Sizes and Types

Jul 16, 2007 -

FlexTRAK-WR Plasma System nominated for 2007 Editors' Choice Best Product Award from Semiconductor International Magazine.

Apr 23, 2007 -

March Plasma Systems Receives Purchase Order for FlexTRAK-WR 200 mm Wafer Processing System

Sep 21, 2017 -

Logic PD Sponsoring, Exhibiting at American Medical Device 2017

Sep 20, 2017 -

Viscom AG adopts Valor Process Preparation solution for electronics manufacturing efficiency

Sep 20, 2017 -

COT Announces PB Swiss Tools’ Two New INSIDER Models: INSIDER STUBBY and INSIDER STUBBY RATCHET

Sep 20, 2017 -

New IPC Studies Show World PCB Market Up in 2016 as North American Market Shrinkage Slows World PCB Production and Annual North American PCB Industry Reports Released

Sep 20, 2017 -

ADLINK Technology invites clients to join the MEC Congress 2017

Sep 19, 2017 -

ASC International to Highlight 3D AOI/SPI Innovations at SMTA International

Sep 19, 2017 -

MicroCare Presents Radically Innovative ‘Greener’ Cleaning Fluid at Parts2Clean Stuttgart Hall 3 Stand A46

Sep 19, 2017 -

Aegis Software’s FactoryLogix a major step on Melecs journey towards Industry 4.0

Sep 19, 2017 -

IPC Invites Industry Leaders to Submit Poster Abstracts for IPC APEX EXPO 2018 in San Diego

Sep 19, 2017 -

SCS Webinar to Address the Use of Parylene for Increased Reliability

See electronics manufacturing industry news »

Nordson MARCH Introduces the SPHERE Series Plasma Treatment Systems for Semiconductor Applications news release has been viewed 799 times

  • SMTnet
  • »
  • Industry News
  • »
  • Nordson MARCH Introduces the SPHERE Series Plasma Treatment Systems for Semiconductor Applications
SMT Custom Nozzles

Plasma Prior to Conformal Coating