Panasonic servodrivers in Tenryu again

Hi friends, I am sorry that I boring you again, but I hope somebody can help me... I have a problem with servodrivers Panasonic MSD5A3P1EA in my Tenryu MT5530. Some servo loops are unstable, motor is shaking. It is problem with driver, when I change it, everything is OK. But I am out of spare drivers and need to repair them. All have the same problem. I tried to start autotuning or change parameters manually and no effect. Problem seems to be at power supply boad. I changed all electrolytic capacitors with no effect. Can you help me to repair these drivers? Than you very much.

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