Key Steps to the Integrated Circuit
Published: |
May 6, 1999 |
Author: |
Mark Melliar-Smith, Douglas E. Haggan, William W. Troutman |
Abstract: |
This paper traces the key steps that led to the invention of the integrated circuit (IC). The first part of this paper reviews the steady improvements in the performance and fabrication of single transistors in the decade after the Bell Labs breakthrough work in 1947. It sketches the various developments needed to produce a practical IC. In addition, the more advanced processes such as diffusion, oxide masking, photolithography, and epitaxy, which culminated in the planar process, are summarized.... |
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