Flexible PCB-MEMS Flow Sensor
Published: |
October 9, 2023 |
Author: |
Anastasios Petropoulosa, Dimitris N. Pagonisb, Grigoris Kaltsasa |
Abstract: |
A flexible gas flow sensor was developed and characterized. The sensor was fabricated on a flexible PCB substrate and is able to quantify flow rate based on the thermal transfer principle. Direct electrical communication to the macroworld is achieved, while the effective thermal isolation enhances sensor performance. Characterization in the range of 1-10 SLPM is presented. ... |
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