Low Pressure Plasma Cleaner
Company Information:
Name: |
Low Pressure Plasma Cleaner |
Category: |
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Offered by: |
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Low Pressure Plasma Cleaner Description:
Low Pressure Plasma Cleaner
This system is integrated in a 19” rack which is equipped with rollers and height-adjustable feet. A professional PLC control unit serves as storage for definable process parameters.
Specification:
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Dimensions of the system (W x D x H) |
670 x 900 x 1,850 mm |
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Dimensions of the chamber (W x D x H) |
250 x 250 x 250 mm |
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Plasma excitation frequency |
Microwave (2.45 GHz) |
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Microwave power |
100-600 W |
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Gas inlets with mass-flow-control |
1 channel |
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Power supply |
230/400 V, 50/60 Hz |
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Power input |
1.5 kVA |
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Vacuum gauge |
Pirani |
Low Pressure Plasma Cleaner was added in Aug 2018
Low Pressure Plasma Cleaner has been viewed 355 times
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