Vertical Net

Make: Ulvac Description: Sputtering System Model#: Z1000 Serial#: HEX44 Year: 1994 Location: Wilmington, MA Condition: Excellent Product Manager: Al Copeland Telephone: 978-658-7041 Email: acopeland@vertical.net Specifications: Wafer size 6-6 inches, cassette SEMI, Cassette (AVG) interface (#of cassetts) AGV arm (CST/L/L), loadlock type direct cassette, metal stocker cas