The Diamond series atmospheric robots represent a significant engineering advancement in the design and reliability of wafer handling equipment. Benefiting from technologically superior components, the robots use ultra low inertia, high-response brushless servomotors coupled with zero-backlash Harmonic Drive® gears to achieve greatly enhanced dexterity and precision. There are five robots within the series: H1, H3, H4, H5 and E5.
The innovative, all-in-one, Class 1 cleanroom compatible design incorporates the motion controller, servo amplifiers, and power supply within the robot’s industry standard footprint. High-strength structural members enable top, bottom or side mount configurations without compromising the system rigidity.
A 32-bit, real-time kernel delivers accurate motion profiling along smooth continuous trajectories, while the distributed control architecture allows a
seamless integration with linear tracks, pre-aligners, and other
Networkable RS-485 and Ethernet interfaces complement the standard RS-232 and teach pendant connections. Powerful native wafer handling and scripting languages facilitate rapid software development for embedding the robots into an OEM application environment. Additionally, comprehensive emulation of legacy robot “macro” commands offers a drop-in compatibility with a wide variety of existing semiconductor tools.
Additional innovative features of the Diamond Wafer Handling Robots include excellent structural rigidity, modular and highly customizable design, arm length from 10.50" and 14.40", vertical travel up to 7", and fully integrated motion controller, servo amplifiers and power supply. The series also provides high response brushless motors and precise zero-backlash Harmonic Drive® gears, optional absolute encoders to eliminate the initial homing procedure, seamless integration with prealigner, linear track and other peripheral components, standard RS-232 interface and Ethernet (Telnet) interfaces to the host computer, powerful wafer handling firmware, comprehensive software tools and utilities, optional teach pendant terminal, software emulation for legacy robot macro commands, and more.
For more information about the Diamond Wafer Handling Robot series, visit http://www.milarasmt.com/products/wafer-handling.html