NEW LOW PROFILE LINEAR MOTOR STAGE

Nov 20, 2008

Steinmeyer, Inc. announced a new low profile, high precision, linear stage model LT190-EDLM. Manufactured from high strength aluminum, the table is driven by an ironless core linear motor with travel ranging from 150 mm to 500 mm. Total table height is only 50 mm. Positioning accuracy, repeatability and maximum speed depend on which one of three high precision encoders is included. Typical speed is 1 m/sec with acceleration of several G's. The stage is designed so that two units may be mounted together directly without an additional interface plate creating a low profile XY configuration (see photo). Together with a rugged right angle bracket, a three axis XYZ arrangement is also available.

Features of this new table include:

� preloaded large cross roller bearings for high stiffness and smooth motion

� cage assist mechanism to prevent cage migration and ensure reliable operation under high accelerations and speeds of the linear motor drive

� sealed design using metal way cover instead of accordion type bellows, eliminating particle generation

The LT190-EDLM offers three linear scale options based on the customer's resolution requirement, from standard 20 nanometers to an incredible 6.25 picometers!

This stage is an excellent choice for clean room applications such as semiconductor processing.

The Steinmeyer group is comprised of two manufacturing divisions located in Germany. August Steinmeyer GmbH & Co. KG (located in Albstadt) has been setting standards for high precision ball screws for over 40 years and prides itself on high quality, innovative designs to meet demanding customer requirements. Our Feinmess Dresden (FMD) division has been producing an extensive line of high precision positioning systems for well over 130 years.

For further information on this new product or others in our extensive product portfolio

call 1-781-273-6220

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