BTU's integrated In-line Diffusion System combines its proven TFQ series quartz-lined conveyor belt diffusion furnace with new phosphorous coating technology, featuring an ultrasonic direct spray phosphorous coater that processes up to 1,500 wafers per hour. BTU's quartz lined furnaces have been optimized for phosphorus diffusion and in-line processing of solar cells.
Use of an in-line diffusion system improves productivity for solar cell manufacturers, with reduced wafer handling and greater throughput than traditional batch processing. Reduced handling translates into lower breakage rates and improved yield. Typical processing times are only 20-25 minutes.
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About BTU International
BTU International is a market-leading, global supplier of advanced thermal processing equipment to the alternative energy and electronics manufacturing markets. BTU equipment is used in solar cell, nuclear fuel and fuel cell manufacturing as well as in the production of printed circuit board assemblies and semiconductor packaging. BTU has operations in North Billerica, MA and Shanghai, China with direct sales and service in the USA, Asia and Europe. Information about BTU International is available at http://www.btu.com.