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FlexTRAK-WR Plasma System nominated for 2007 Editors' Choice Best Product Award from Semiconductor International Magazine.

Jul 16, 2007

The FlexTRAK™-WR system is designed for high-throughput processing of semiconductor wafers up to 300mm (12 in.) in diameter. The patented plasma chamber design provides exceptional etch uniformity and process repeatability. Its three-axis symmetrical chamber ensures all areas of the wafer are treated uniformly, while tight control over all process parameters ensures highly repeatable results.

The FlexTRAK™-WR system is designed for high-throughput processing of semiconductor wafers up to 300mm (12 in.) in diameter. The patented plasma chamber design provides exceptional etch uniformity and process repeatability. Its three-axis symmetrical chamber ensures all areas of the wafer are treated uniformly, while tight control over all process parameters ensures highly repeatable results.

March Plasma Systems, the global leader in advanced plasma treatment systems, announced today that it has nominated its advanced wafer processing plasma system, the FlexTRAK-WR system, for the prestigious 2007 Editors' Choice Best Product Award sponsored by Semiconductor International magazine.

The FlexTRAK-WR system is designed for advanced plasma processing of semiconductor wafers, and is available in two models. The FlexTRAK-WR 200 system is for processing wafers in open cassettes or SMIF pods, typically wafers up to 200 mm in diameter. The FlexTRAK-WR 300 system is for processing wafers up to 300 mm in diameter in FOUP pods.

The FlexTRAK-WR system is suitable for advanced plasma applications such as photoresist and BCB descum, ashing, etching, surface cleaning and contamination removal. The system has a proprietary plasma chamber design and fully integrated wafer handler that provides exceptional on-wafer performance, error-free wafer handling, and best-in-class throughput.

Winners of the award will be announced in July during the Semicon West trade show.

March also plans to display a 300 mm version of its FlexTRAK-WR system at this year's Semicon West trade show held in San Francisco, California, from July 17 to July 19, 2007.


March Plasma Systems is the global leader in plasma processing technology for the device / life science, semiconductor and printed circuit board industries. March has customer support centers worldwide, including California, Florida, Europe, and throughout Asia. With over 20 years of continuous innovation, March designs and manufactures a complete line of award-winning and patented plasma processing systems. March Plasma Systems, Inc. is a wholly owned subsidiary of Nordson Corporation, (Nasdaq: NDSN) the world's leading producer of precision dispensing equipment.

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