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  • March Plasma Systems Receives Purchase Order for FlexTRAK-WR 200 mm Wafer Processing System

March Plasma Systems Receives Purchase Order for FlexTRAK-WR 200 mm Wafer Processing System

Apr 23, 2007

FlexTRAK-WR 200 Wafer Processing System.

FlexTRAK-WR 200 Wafer Processing System.

March Plasma Systems, a subsidiary of Nordson Corporation (NASDAQ: NDSN) announced today it has received a firm purchase order for a FlexTRAK-WR wafer processing system from a major semiconductor manufacturing company.

The system is scheduled to be delivered the first half of 2007, where it will be installed for the purpose of high-volume semiconductor device manufacturing on 200 mm wafers.

"The FlexTRAK-WR system continues to gain acceptance by major semiconductor customers for photoresist descum, wafer cleaning, etching and other wafer applications," said James Getty, Director of Applications at March Plasma Systems.

"The FlexTRAK-WR system provides advanced processing capabilities at an attractive price point with a low cost of ownership," Mr. Getty continued. "Because it demonstrates excellent on-wafer performance combined with high throughput, it is an appealing choice for high-volume semiconductor device manufacturers."

The FlexTRAK-WR "200" system is for processing wafers up to 200 mm in diameter in open cassettes or SMIF pods. The FlexTRAK-WR "300" system is for wafers up to 300 mm in diameter in FOUP pods. The FlexTRAK-WR system is designed for plasma applications such as photoresist descum, ashing, etching, surface cleaning and contamination removal. The system has a proprietary plasma chamber design and fully integrated wafer handler that provides exceptional on-wafer performance, error-free wafer handling and best-in-class throughput.


March Plasma Systems is the global leader in plasma processing technology for the semiconductor, PCB, life science, and microelectronics industries. March has offices and applications laboratories worldwide, including California, Florida, Europe, Singapore, China, Japan, Korea and Taiwan. With over 20 years of continuous innovation, March designs and manufactures a complete line of award-winning and patented plasma processing systems. An expert staff of scientists and engineers is available to assist in the development of plasma processes that improve both product reliability and increase production yields. March Plasma Systems, Inc. is a wholly owned subsidiary of Nordson Corporation, (Nasdaq: NDSN) the world's leading producer of precision dispensing equipment.

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