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CyberOptics Demonstrates Advanced Airborne Particle Sensing Technology at SEMICON West

May 24, 2018

Airborne Particle Sensor (APS3) 300mm with new ParticleSpectrum™ software.

Airborne Particle Sensor (APS3) 300mm with new ParticleSpectrum™ software.

CyberOptics® Corporation (NASDAQ: CYBE), a leading global developer and manufacturer of high precision 3D sensing technology solutions, announces plans to exhibit at SEMICON West, scheduled to take place July 10-12, 2018 at the Moscone Center in San Francisco, CA. The company will demonstrate its next-generation Airborne Particle Sensor (APS3) 300mm with new ParticleSpectrum™ software in Booth #6163.

CyberOptics’ WaferSense® APS3 speeds equipment set-up and long-term yields in semiconductor fabs by wirelessly detecting, identifying and monitoring airborne particles in real-time. With a thinner and lighter form factor to travel through semiconductor tools with ease, the APS3 offers leading accuracy and sensitivity valued by equipment and process engineers around the world.

The APS3 solution includes ParticleSpectrum software – a completely new, touch-enabled interface with user-friendly functionality, making it simple to read, record and review small to large airborne particle data. Easily identify when and where the particles originate and see the effects of cleanings, adjustments and repairs in real-time.

We’ve taken what is documented as the best known method (BKM) for airborne particle sensing in semiconductor fabs to significantly improve yields and tool uptime, and made it even easier to use,” said Dr. Subodh Kulkarni, President and CEO, CyberOptics. “Engineers can monitor critical data from one, or multiple devices with an enhanced software application.”

CyberOptics’ Airborne Particle Sensors (APS) have proven to deliver up to 90% time savings, 95% expense reduction and up to 20X the throughput with half the manpower relative to legacy surface scan wafer methods.

Additionally, CyberOptics will display the new PanelSense™ Airborne Particle Sensor (APS-FPD) delivering the same valued benefits as the APS3, but designed specifically for the Flat Panel Display manufacturing market.

The WaferSense and ReticleSense measurement portfolio including the Auto Leveling System (ALS & ALSR), the Auto Gapping System (AGS), the Auto Vibration System (AVS), the Auto Teaching System (ATS), the Airborne Particle Sensors (APS 2, 3, APSR & APSRQ) and the new Auto Multi Sensor (AMS & AMSR), are available in various wafer shaped and reticle shaped form factors depending on the device. The PanelSense measurement portfolio including the Airborne Particle Sensor (APS-FPD) is available in a flat panel display compatible form factor.


CyberOptics Corporation (NASDAQ: CYBE) is a leading global developer and manufacturer of high precision sensing technology solutions. CyberOptics sensors are being used in general purpose metrology and 3D scanning, surface mount technology (SMT) and semiconductor markets to significantly improve yields and productivity. By leveraging its leading edge technologies, the company has strategically established itself as a global leader in high precision 3D sensors, allowing CyberOptics to further increase its penetration of its key vertical segments. Headquartered in Minneapolis, Minnesota, CyberOptics conducts worldwide operations through its facilities in North America, Asia and Europe.

Statements regarding the Company’s anticipated performance are forward-looking and therefore involve risks and uncertainties, including but not limited to: market conditions in the global SMT and semiconductor capital equipment industries; the timing of orders and shipments of our products, particularly our 3D MRS-enabled AOI systems; increasing price competition and price pressure on our product sales, particularly our SMT systems; the level of orders from our OEM customers; the availability of parts required to meet customer orders; unanticipated product development challenges; the effect of world events on our sales, the majority of which are from foreign customers; rapid changes in technology in the electronics markets; product introductions and pricing by our competitors; the success of our 3D technology initiatives; the success of CyberGage360; and other factors set forth in the Company’s filings with the Securities and Exchange Commission. For more information about the entire line of CyberOptics solutions please visit www.cyberoptics.com.

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Feb 28, 2018 -

CyberOptics’ Industry-Leading MRS-Enabled SE3000™ 3D SPI Receives NPI Award

Feb 19, 2018 -

CyberOptics Demonstrates Advanced Airborne Particle Sensing Technology Recognized as Best Known Method (BKM) at SEMICON China

Feb 19, 2018 -

CyberOptics Demonstrates Yield-Improving Wireless Measurement Devices for Semiconductor Tools at SPIE

Jan 29, 2018 -

CyberOptics Launches Next Generation Airborne Particle Sensor (APS3) with New ParticleSpectrum™ Software

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CyberOptics Demonstrates New MRS-Enabled 3D AOI, SPI and CMM Systems at APEX

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CyberOptics’ New Ultra-High Resolution Multi-Reflection Suppression (MRS) Sensor Receives Global Technology Award

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