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A Novel Method for the Fabrication of a High-Density Carbon Nanotube Microelectrode Array

Published:

November 3, 2016

Author:

Adam Khalifa, Zhaoli Gao, Amine Bermak, Yi Wang, Leanne Lai Hang Chan

Abstract:

We present a novel method for fabricating a high-density carbon nanotube microelectrode array (MEA) chip. Vertically aligned carbon nanotubes (VACNTs) were synthesized by microwave plasma-enhanced chemical vapor deposition and thermal chemical vapor deposition. The device was characterized using electrochemical experiments such as cyclic voltammetry, impedance spectroscopy and potential transient measurements. Through-silicon vias (TSVs) were fabricated and partially filled with polycrystalline silicon to allow electrical connection from the high-density electrodes to a stimulator microchip.

In response to the demand for higher resolution implants, we have developed a unique process to obtain a high-density electrode array by making the microelectrodes smaller in size and designing new ways of routing the electrodes to current sources....

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Company Information:

Hong Kong University of Science

Established in 1991, the HKUST is an international research university dedicated to top-notch education and research.

Hong Kong, Hong Kong

School

  • Phone +852 2358 8888

Hong Kong University of Science website

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(1) technical library article

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