FlexTRAK Series Plasma Treatment Systems

FlexTRAK Series Plasma Treatment Systems Description:

FlexTRAK plasma treatment systems offer high-throughput, strip-type, and inline boat processing for advanced semiconductor packaging applications.

The FlexTRAK/FlexTRAK-S, FlexTRAK-CD/FlexTRAK-CDS, FlexTRAK-2MB, and FlexTRAK-SHS systems suit various plasma cleaning, surface activation, and adhesion improvement applications.

The FlexTRAK Series:

• State-of-the-art F3 plasma chamber technology for direct or ion-free processing on elevated rails for a conductive electrode or directly on an insulated electrode for exceptional uniformity, plasma efficiency, throughput, and scalability.
• Flexible chamber configurations support contamination removal, etching, and surface activation before die attach, wire bond, molding and encapsulation, and underfill applications.
• The systems accommodate various form factors, including lead frames, carriers, Jedec/Auer® boats, strips, and laminates.