I'm looking for the cad & part data for the glass board used on Fuji QP machines calibration. It is a Toppan glass board BVDZ-0240 and the glass parts going on it is a 284 pins BVDZ 0040. There another one in the kit. Glas board is BVDZ-0200 and the glass parts is BVDZ-0150. This one is a 108 pins.
Both are 2,5 micron vernier.
I have the boards and the parts but no cad and no part description ( PDG ).